Designed for secondary silicon wafer processing while exposed to vacuum, 4-axis (XYθZ) positioning gantry features X and Y axes driven by brushless linear motor DR Positioning Stages. While θ axis is worm gear stage driven by rotary stepper motor under closed loop control in conjunction with arc-segmented linear encoder, Z axis linear motion is achieved using voice coil positioning stage operating under closed loop position control. Rotary axis is capable of full 360° rotation.<br />
This story is related to the following:Gantries