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NIST Confirms Microscope Technique as valid nano-measurement tool.

2015-11-23 14:31:08| Industrial Newsroom - All News for Today

Experiments have confirmed that one technique, developed several years ago at NIST, can enable optical microscopes to measure 3D shape of objects at nanometer-scale resolution. Results could make said technique, Through-focus Scanning Optical Microscopy (TSOM), useful for QC regarding manufacture of such nanoscale devices as next-generation microchips. In 3D shapes, TSOM can detect variations of <1 nm size among objects <50 nm across.

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