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Piezo Flexure Positioning Stage deliver frictionless Z motion.

2015-08-21 14:31:07| Industrial Newsroom - All News for Today

Offering travel ranges of 50–250 µm, PIHera miniature closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1 nm. Flexure-guided piezo nanopositioning stage provides vibrationless motion, and FEA-optimized package lends to high stiffness and extended lifetime. Along with positioning accuracy of 0.02%, features include optional vacuum compatibility.

Tags: stage motion deliver positioning

Category:Industrial Goods and Services

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