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Robot Loading System enhances production ALD systems.

2014-03-07 14:31:17| Industrial Newsroom - All News for Today

Based on industrial robotics, fully automatic sample handling system suits large scale batch Atomic Layer Deposition (ALD) reactors. Efficient production rate can be achieved by clustering several P-300B batch ALD tools and synchronizing sample loading/unloading of individual tools with robot. Other available sample handling options include linear loader, vacuum load lock, central vacuum robot sample handling unit, pneumatic chamber lift, and loading through inert atmosphere glove box. This story is related to the following:Machine Loading Robots

Tags: system systems production loading

Category:Industrial Goods and Services

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