With up to 260 mm measuring range, 0.8 nm vertical resolution, and <100 nm form deviations, MarSurf LD 130/260 Aspheric facilitate multi-set grinding and polishing process for precision optics by providing 2D and 3D measurements for evaluation of contour and surface topography. Measuring speed is up to 10 mm/s for large lenses and down to 0.02 mm/s for micro lenses. Included probe system has biomimetic probe arm design optimized for stiffness, damping, and minimal moment of inertia.
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