With optional low vapor precursor delivery system, Savannah G2 enables growth of such novel materials as single- and multi-component films from Perovskite, Yttrium, Lithium, and rare earth families. Other options — ellipsometry, Quartz Crystal Microbalance (QCM), and mass spectrometry — allow simultaneous growth of ALD films and real-time characterization of deposition process. Combined, capabilities enable deposition of films and use of in-situ analysis for R&D environments.