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Atomic Layer Deposition System offers field-upgradable options.

2015-01-12 14:31:00| Industrial Newsroom - All News for Today

With optional low vapor precursor delivery system, Savannah G2 enables growth of such novel materials as single- and multi-component films from Perovskite, Yttrium, Lithium, and rare earth families. Other options — ellipsometry, Quartz Crystal Microbalance (QCM), and mass spectrometry — allow simultaneous growth of ALD films and real-time characterization of deposition process. Combined, capabilities enable deposition of films and use of in-situ analysis for R&D environments.

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