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Interferometer suits large aperture form metrology.

2015-06-26 14:31:05| Industrial Newsroom - All News for Today

Able to characterize flat surfaces up to 12 in. in diameter, Verifire™ XL Fizeau Interferometer is suitable for measuring large plano surfaces, such as mirrors, semiconductor wafers, or optical windows. Instrument features integrated reference optic with proprietary full area calibration, enabling metrology to better than 30 nm PV over full 300 mm aperture. Verifire™ XL comes with integrated TMC vibration isolation platform and ZYGO’s patented QPSI™ vibration-robust acquisition technology.

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