Coupling electron-beam review with optical inspection facilitates rapid defect discovery, identification and sourcing<br />
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MILPITAS, Calif. -- Today KLA-Tencor Corporation (NASDAQ: KLAC) announced the new 2910 Series optical wafer defect inspection platform with NanoPoint™ technology and the new eDR™-7100 electron-beam wafer defect review system. Meeting IC manufacturers' need for accelerated defect sourcing on advanced devices, these two tools combine increased speed with ...This story is related to the following:Optical Inspection Systems | Wafer Inspection Systems