Based on CMOSens® Technology, Model SLQ-QT500 covers flow rates from 0–120 mL/min. Microthermal flow measurement is performed through flow channel wall, which separates chip from measured liquids, so only PFA tubing and quartz flow channel are in direct contact with liquid. Equipped with RS485 digital interface, sensor provides sample rate up to 1 ms. Device is suitable for measuring hydrocarbon-based solvents such as photoresists, as well as water-based liquids such as TARC and H2O2.
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