Designed to resist liquid/dust ingress, I-Series Mass Flow Controllers are general purpose, metal or elastomer-sealed instruments available with analog or digital I/O. Digital flow control electronics and patented thermal sensor provide 1% set point accuracy and precise flow control for full scale flow rates from 5 sccm to 50 slm or 100–250 slm, depending on model. Multi-gas/multi-range capability, enabled through onboard Ethernet interface, lets user change device gas and range.
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