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Metrology System supports 3D wafer fabrication.

2015-07-16 14:31:08| Industrial Newsroom - All News for Today

By offering wide range of metrology measurements that drive tighter process control for critical parameters in Logic, Flash, and DRAM, HelioSense100™ Optical CD System supports industry transition to multi-patterning small pitch manufacturing and 3D vertical devices. Standalone system is optimized by NovaMARS modeling software and Nova's high-performance computation solution, allowing customers to utilize system from early R/D stages through to manufacturing and device maturity.

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