Consisting of hardware and software package, ZEISS Atlas 5 extends capacity of SEMs and FIB-SEMs. System streamlines automatic image acquisition, enabling navigation and correlation of images from any source including light and X-ray microscopes. Users can acquire large sets of 2D or 3D microscope images for hours, or even days, without operator supervision. Correlative workspace brings together images from multiple sources: zooming in from full macroscopic view down to nanoscale details.