With 1,500 g load capacity, 6-axis Model P-915KWEF is designed for dynamic error correction for 6° of freedom. Capacitance direct metrology sensors and parallel-kinematic design with piezo actuator direct drives result in compact and stiff positioning solution. Product provides 1 nm linear resolution, 0.07 µrad angular resolution, and positioning range up to 70 µm. Mounted inside rotary stages, Model P-915KWEF virtually eliminates wobble and eccentricity errors.