With standard sampling rate of 16,000 Hz that virtually eliminates effects of target vibration on measurement value, LS-9000 series is designed to keep up with any production line while maintaining repeatability of 0.03 μm. Vibration isolation system within head protects against damage from vibration and impact, and design has no moving parts. Target monitor and tilt correction function lets users see position of target in measurement axis in real-time via integrated CMOS camera.
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