NanoMover, MicnoMover, and MicnoMover Mini, depending on model and purpose, have up to 3 kg load capacity and can travel up to 50 mm with 20 nm positioning accuracy. Supporting finer resolution range for precision positioning adjustment in motion applications, stages are driven by mechanical means and PZT actuators and use frictionless flexures as guiding mechanism. Latter virtually eliminates Pitch, Yaw, and Roll error, and accuracy allows fine-tuning to find optimal target position.
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