Offering travels up to 200 x 200 mm, A-311 PIglide IS Series features fully preloaded air bearings that provide frictionless motion, resulting in negligible hysteresis or reversal error. Single base plate design facilitates integration in tight spaces. By eliminating height and overhung loads of XY stack design, stage achieves 0.1 µm/in. straightness and flatness and roll/pitch/yaw errors of 1–2 arc-sec. Position information down to 1 nm resolution comes from integrated linear encoders.