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Vibration Cancellation System uses voice coil technology.

2015-02-05 14:30:30| Industrial Newsroom - All News for Today

Integrating serial-type architecture of STACIS® technology with voice coil technology, frame-mountable Stage-Base™ 450 offers vibration and motion cancellation technology for semiconductor tools that incorporate high-precision motorized X-Y stages. Commercial solution provides active floor vibration cancellation starting at 0.6 Hz increasing to 10-to-1 reduction by 2 Hz with voice coil technology. Optional voice coil motors with feed-forward control enable even faster settling time.

Tags: system technology voice cancellation

Category:Industrial Goods and Services

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