Equipped with fully preloaded air bearings, A-311 PIglide IS Series features frictionless motion, resulting in negligible hysteresis or reversal error and zero-wear of mechanical components. Due to air bearing’s surface averaging effect, pitch/yaw/roll and straightness/flatness are significantly better than with conventional mechanical bearings. Planar XY stages are suited for metrology, wafer inspection, laser marking, and other precision motion applications.