MIDDLEFIELD, Conn. – Zygo Corporation (Nasdaq:ZIGO), a worldwide supplier of optical metrology instruments and high precision optical systems, today announced that its Semiconductor Advanced Packaging Systems group has been awarded an order valued in excess of $3 million from a major Asian IC substrate manufacturer to deliver multiple state-of-the-art High Volume Manufacturing (HVM) 3D/2D metrology systems for production process monitoring and product yield enhancement. These ...This story is related to the following:Metrology Equipment