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A*STAR develops robust MEMS pressure sensor

2013-01-06 18:35:23| Semiconductors - Topix.net

A research team from the A*STAR Institute of Microelectronics in Singapore has produced a miniaturized sensor that couples a stable diaphragm with sensitive silicon nanowires paving way for is straightforward: create a pressure-deformable diaphragm and then embed a piezoresistor made from a material in which pressure causes a change in electrical ... (more)

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