Company's New Single-Station Chamber Advanced Dielectric Etcher Qualified by Leading Korean Customer for Critical Flash Applications at 20nm and Below<br />
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SHANGHAI and SEOUL, South Korea – Advanced Micro-Fabrication Equipment Inc. (AMEC) said today that it has developed a Single-Station Chamber Advanced Dielectric Etcher (Primo SSC AD-RIE™) capable of processing the most rigorous semiconductor applications. In less than 12 months, the Primo SSC AD-RIE system was qualified ...This story is related to the following:Materials and Material ProcessingSemiconductor Processing Equipment | Electric Etchers | Dielectric Materials