Offering 0.5 µm resolution, <10 µm run-out, and 1 mrad pitch and yaw over full 6 mm travel range, 28 x 20 x 9.5 mm M3-LS Linear Smart Stage integrates high-resolution SQUIGGLE® piezoelectric micro motor, low-friction bearing guide, position sensor, microprocessor, and firmware. All electronics are completely integrated in stage housing, and external control board is not required. Micro-mechatronic smart module supports side loads of up to 20 g without loss of precision or speed.
This story is related to the following:Linear Motor Driven Stages |