Supporting optical CD application development, NovaMARS v6.0 optimizes time-to-solution for complex 3D structures in 2X and 1X technology nodes. Modeling engine supports Hybrid Metrology functions, combining data from other metrology tools to optimize overall metrology performance. Advanced metrology techniques enable control over weak parameters in complex 3D structures such as VNAND memory cells or FinFET logic structures by extracting more structure shape parameters for complex geometries.
This story is related to the following:Modeling Software | Metrology Software