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Park Systems Joins Forces With imec To Develop Advancements In Nanoscale AFM Metrology Solutions For Semiconductor Manufacturing

2015-03-12 07:39:15| metrologyworld Home Page

Park Systems, world-leader in Atomic Force Microscopes (AFM) announced today they have signed a Joint Development Project (JDP) with nanoelectronics research center imec, to develop in-line AFM metrology solutions of future technology nodes including but not limited to surface roughness, thickness, critical dimension (CD), and sidewall roughness

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