Miniature, transportable sample vacuum chamber can be used for transferring wafer/substrates under vacuum from glove box with special environment into vacuum or cryogenic micro-manipulated probe station (or into vacuum chamber) and back into glove box after testing, measurements, or preparations. Without requiring gate valves, product protects wafer/substrates from atmospheric contamination both on loading and unloading. Typical sizes are 50 mm dia and 25 mm thick.
This story is related to the following:Environmental Chambers |