Home Silicon Carbide XY Air-Bearing Stage is built for precision.
 

Keywords :   


Silicon Carbide XY Air-Bearing Stage is built for precision.

2015-04-13 14:31:06| Industrial Newsroom - All News for Today

Used for semiconductor manufacturing and advanced test/inspection, PlanarHDX is available with passive or active isolation systems. FEA-optimized silicon carbide structure and optimized air-bearing compensation maximize dynamic performance while maintaining geometric characteristics and positioning accuracy. This planar air-bearing platform is capable of 1.5 m/sec scan speeds and 5 g peak acceleration with payload of up to 20 kg while maintaining dynamic tracking and geometric performance.

Tags: built stage precision silicon

Category:Industrial Goods and Services

Latest from this category

All news

19.11POWTEX2024 The 25th International Powder Technology Exhibition Tokyo
Industrial Goods and Services »
23.11 10
23.11MusyaPop210
23.11S.H.Figuarts
23.11 Kanye West
23.11
23.111TC
23.11
23.11abe
More »