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Home › Batch ALD Tool offers fully automated batch processing.

 

Batch ALD Tool offers fully automated batch processing.

2013-11-22 14:28:47| Industrial Newsroom - All News for Today

Optimized for manufacturing of MEMS, LEDs, and power electronics components, PICOSUN™ P-200 batch Atomic Layer Deposition (ALD) system delivers modularity, flexibility, and automation options. It is designed for 150 or 200 mm wafer size in batches of 25 and can be equipped with linear inline loader. Tool can be operated with industrial robot, connected to vacuum robot, or integrated with vacuum load lock, glove box, or mini clean environment. This story is related to the following:Depositors |

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Category:Industrial Goods and Services

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