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Home › KLA-Tencor Extends Its 5D(TM) Patterning Control Solution with New Metrology Systems

 

KLA-Tencor Extends Its 5D(TM) Patterning Control Solution with New Metrology Systems

2015-02-26 11:31:44| Industrial Newsroom - All News for Today

Comprehensive Overlay and Films Process Control Solutions Address Advanced IC Process Challenges MILPITAS, Calif.  Today, KLA-Tencor Corporation (NASDAQ: KLAC) introduced two advanced metrology systems that support the development and production of 16nm and below IC devices: Archer 500LCM and SpectraFilm LD10...

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