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KLA-Tencor Extends Its 5D(TM) Patterning Control Solution with New Metrology Systems
2015-02-26 11:31:44| Industrial Newsroom - All News for Today
Comprehensive Overlay and Films Process Control Solutions Address Advanced IC Process Challenges MILPITAS, Calif. Today, KLA-Tencor Corporation (NASDAQ: KLAC) introduced two advanced metrology systems that support the development and production of 16nm and below IC devices: Archer 500LCM and SpectraFilm LD10...
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Category:Industrial Goods and Services
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