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KLA-Tencor Introduces Key Systems for 5D(TM) Patterning Control Solution

2014-08-26 06:00:00| Industrial Newsroom - All News for Today

Accelerating The Ramp Of Advanced Patterning Techniques For Sub-20nm Design Nodes<br /> <br /> MILPITAS, Calif., -- Today, KLA-Tencor Corporation (NASDAQ: KLAC) introduced the WaferSight(TM) PWG patterned wafer geometry measurement system, the LMS IPRO6 reticle pattern placement metrology system and the K-T Analyzer(®) 9.0 advanced data analysis system. These three new products support KLA-Tencor&#39;s unique 5D(TM) patterning control solution, which addresses five elements of patterning ...This story is related to the following:Laboratory and Research Supplies and EquipmentWafer Processing Systems | Data Analysis Software

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