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Park Systems Announces Joint Development Partnership with imec to Develop Nanoscale AFM Metrology Solutions for Semiconductor Manufacturing
2015-03-09 11:31:11| Industrial Newsroom - All News for Today
SUWON, Korea Park Systems, world-leader in Atomic Force Microscopes (AFM) announced today they have signed a Joint Development Project (JDP) with nanoelectronics research center imec, to develop in-line AFM metrology solutions of future technology nodes including but not limited to surface roughness, thickness...
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