Using moving slits, NIST-calibrated NanoScan™ 2s measures beam position and size with sub-micron precision for CW and kilohertz pulsed lasers. Offering of silicon, germanium, or pyroelectric detectors allows profiling lasers of any wavelength, from UV to far infrared, to 100 µm and beyond. Digital controller, by providing 16-bit digitization of signal for dynamic range up to 35 dB power, enables measurement of beam size and pointing with 3-sigma precision to several hundred nanometers.